The chief technology officer of ASML said high-NA may be the end of the line for lithography.
"For years, I’ve been suspecting that high-NA will be the last NA, and this belief hasn’t changed.” said Martin van den Brink, in an interview with Bits & Chips.
1/9 Thread $ASML
"For years, I’ve been suspecting that high-NA will be the last NA, and this belief hasn’t changed.” said Martin van den Brink, in an interview with Bits & Chips.
1/9 Thread $ASML
2/9 ASML CTO
ASML is researching the successor to high-NA, called hyper-NA. But the cost of hyper-NA may be too high.
“If the cost of hyper-NA grows as fast as we’ve seen in high-NA, it will pretty much be economically unfeasible,” Van den Brink said.
#Semiconductors $ASML
ASML is researching the successor to high-NA, called hyper-NA. But the cost of hyper-NA may be too high.
“If the cost of hyper-NA grows as fast as we’ve seen in high-NA, it will pretty much be economically unfeasible,” Van den Brink said.
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3/9 ASML CTO
The goal of ASML’s hyper-NA research program is to come up with ways to keep costs down.
“We’re trying to come up with fundamental changes in manufacturing and design to make sure that if we’re going to do it, it will be economically feasible,” he said.
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The goal of ASML’s hyper-NA research program is to come up with ways to keep costs down.
“We’re trying to come up with fundamental changes in manufacturing and design to make sure that if we’re going to do it, it will be economically feasible,” he said.
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4/9 ASML CTO
By contrast, the successor to current EUV lithography, high-NA (numerical aperture) appears to be coming along smoothly.
“That machine is a highlight of my career,” said Van den Brink, who will retire in 2024.
$ASML #Semiconductors
By contrast, the successor to current EUV lithography, high-NA (numerical aperture) appears to be coming along smoothly.
“That machine is a highlight of my career,” said Van den Brink, who will retire in 2024.
$ASML #Semiconductors
5/9 ASML CTO
-2023: The world’s first high-NA scanner will be installed at a joint ASML & Imec research lab.
-2024: Customers receive high-NA R&D machines
-2025: The first high-volume production machines will be delivered. The idea is a smooth transition.
$ASML #Semiconductors
-2023: The world’s first high-NA scanner will be installed at a joint ASML & Imec research lab.
-2024: Customers receive high-NA R&D machines
-2025: The first high-volume production machines will be delivered. The idea is a smooth transition.
$ASML #Semiconductors
6/9 ASML CTO
Supply chain issues could affect the timing, since the high-NA machines use many of the same components as current EUV machines, and ASML is already rapidly expanding output to meet heavy demand.
“… today’s meal takes priority over tomorrow’s,” Van den Brink said.
Supply chain issues could affect the timing, since the high-NA machines use many of the same components as current EUV machines, and ASML is already rapidly expanding output to meet heavy demand.
“… today’s meal takes priority over tomorrow’s,” Van den Brink said.
7/9 ASML
High-NA will guzzle more power:
“Back in the day, a scanner needed a few hundred kilowatts. For EUV, it’s 1.5 megawatts, primarily because of the light source. We use the same light source for high-NA, but we need an additional 0.5 megawatts for the stages,” he said.
High-NA will guzzle more power:
“Back in the day, a scanner needed a few hundred kilowatts. For EUV, it’s 1.5 megawatts, primarily because of the light source. We use the same light source for high-NA, but we need an additional 0.5 megawatts for the stages,” he said.
8/9 ASML CTO
Van den Brink has ASML’s technological course for the next 10-years mapped out: focusing on reducing costs for EUV and high-NA patterning, which will take another decade of work. The company will also seek to boost productivity and reduce production defects.
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Van den Brink has ASML’s technological course for the next 10-years mapped out: focusing on reducing costs for EUV and high-NA patterning, which will take another decade of work. The company will also seek to boost productivity and reduce production defects.
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9/9 ASML CTO
And during the interview, Van den Brink raised an even touchier issue:
“…at this point, the question has become very real: which chip structures are too small to manufacture economically?”
$ASML #Semiconductors
Great story, read here:
bits-chips.nl/artikel/hyper-…
And during the interview, Van den Brink raised an even touchier issue:
“…at this point, the question has become very real: which chip structures are too small to manufacture economically?”
$ASML #Semiconductors
Great story, read here:
bits-chips.nl/artikel/hyper-…
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